Micro-solid oxide fuel cell (SOFC) systems are anticipated for powering small, portable electronic devices, such as laptop, personal digital assistant (PDA), medical and industrial accessories. It is predicted that micro-SOFC systems have a 2-4 higher energy density than Li-ion batteries [1]. However, literature mainly focuses on the fabrication and characterization of thin films and membranes for micro-SOFC systems [2-12]; the entire system approach is not yet studied in detail. We will therefore discuss in this paper the entire approach from the fabrication of thin films and membranes up to the complete system, including fuel processing, thermal management and integration.