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Direct fabrication of NIL stamps using Stencil Lithography

Villanueva, G.  
•
Vazquez-Mena, O.  
•
Kiefer, T.  
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2008
Eurosensors XXII

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Villanueva, G., Vazquez-Mena, O., Kiefer, T., & Brugger, J. (2008). Direct fabrication of NIL stamps using Stencil Lithography. Eurosensors XXII, Dresden, Germany. https://infoscience.epfl.ch/handle/20.500.14299/35733

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