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  4. A pneumatic air table realized by microelectro-discharge machining
 
research article

A pneumatic air table realized by microelectro-discharge machining

Guenat, O.
•
Hirata, T.
•
Akashi, T.
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1998
Journal of Microelectromechanical Systems
  • Details
  • Metrics
Type
research article
DOI
10.1109/84.735345
Author(s)
Guenat, O.
Hirata, T.
Akashi, T.
Grétillat, M.-A.
de Rooij, N. F.  
Date Issued

1998

Publisher

Institute of Electrical and Electronics Engineers

Published in
Journal of Microelectromechanical Systems
Volume

7

Issue

4

Start page

380

End page

386

Note

181

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39341
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