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  4. Demonstration of subthrehold swing smaller than 60mV/decade in Fe-FET with P(VDF-TrFE)/SiO₂ gate stack
 
conference paper

Demonstration of subthrehold swing smaller than 60mV/decade in Fe-FET with P(VDF-TrFE)/SiO₂ gate stack

Salvatore, G. A.  
•
Bouvet, D.  
•
Ionescu, A. M.  
2008
Electron Devices Meeting, 2008. IEDM 2008. IEEE International

This work experimentally demonstrates, for the first time, that by integrating a thin ferroelectric layer into a gate stack of a standard MOS transistor one, it is possible to overcome the 60 mV/decade subthreshold swing limit at room temperature of MOSFET. We find sub-threshold swings as low as 13 mV/decade in Fe-FETs with 40 nm P(VDF-TrFE)/SiO₂ gate stack. The mechanism governing the low subthreshold swing in Fe-FET transistors is the negative capacitance of the ferroelectric layer that provides voltage amplification; with our particular ferroelectric gate stack we report for the first time negative capacitance at room temperature.

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Type
conference paper
DOI
10.1109/IEDM.2008.4796642
Web of Science ID

WOS:000265829300037

Author(s)
Salvatore, G. A.  
•
Bouvet, D.  
•
Ionescu, A. M.  
Date Issued

2008

Published in
Electron Devices Meeting, 2008. IEDM 2008. IEEE International
Start page

1

End page

4

Subjects

MOSFET

•

ferroelectric thin films

•

silicon compounds

•

Fe-FET

•

P(VDF-TrFE)/SiO2 gate stack

•

SiO2

•

negative capacitance

•

size 40 nm

•

standard MOS transistor

•

subthrehold swing

•

thin ferroelectric layer

•

voltage amplification

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Available on Infoscience
July 15, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/41346
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