research article
Interferometric fabrication of modulated submicrometer gratings in photoresist
1995
Type
research article
Author(s)
Date Issued
1995
Published in
Volume
34
Start page
2540
End page
2547
Editorial or Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
April 22, 2009
Use this identifier to reference this record