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research article

SWNT array resonant gate MOS transistor

Arun, A.
•
Campidelli, S.
•
Filoramo, A.
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2011
Nanotechnology

We show that thin horizontal arrays of single wall carbon nanotubes (SWNTs) suspended above the channel of silicon MOSFETs can be used as vibrating gate electrodes. This new class of nano-electromechanical system (NEMS) combines the unique mechanical and electronic properties of SWNTs with an integrated silicon-based motion detection. Its electrical response exhibits a clear signature of the mechanical resonance of SWNT arrays (120-150 MHz) showing that these thin horizontal arrays behave as a cohesive, rigid and elastic body membrane with a Young's modulus in the order of 1-10 GPa and ultra-low mass. The resonant frequency can be tuned by the gate voltage and its dependence is well understood within the continuum mechanics framework.

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Type
research article
DOI
10.1088/0957-4484/22/5/055204
Web of Science ID

WOS:000285581600006

Author(s)
Arun, A.
Campidelli, S.
Filoramo, A.
Derycke, V.
Salet, P.
Ionescu, A. M.  
Goffman, M. F.
Date Issued

2011

Published in
Nanotechnology
Volume

22

Issue

5

Article Number

055204

Subjects

Carbon Nanotubes

•

Integration

•

Oscillator

•

Sensors

•

Devices

•

Sheets

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Available on Infoscience
December 16, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/74546
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