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conference paper

X-Band Aom On Chip

Tian, Hao
•
Liu, Junqiu  
•
Siddharth, Anat  
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January 1, 2021
2021 34Th Ieee International Conference On Micro Electro Mechanical Systems (Mems 2021)
34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Silicon Nitride integrated photonic circuits have drawn much attention owing to its ultra-low loss and large Kerr nonlinearity. However, the lack of Pockels effect makes it difficult to be modulated clectro-optically, which posts a major challenge for the further development of Si3N4 circuits with advanced functions. The widely adopted thermo-optical tuning suffers from large power consumption and restricted speed (similar to 1 kHz). In this study, microwave frequency modulation (up to 9 GHz) of Si3N4 ring resonator is achieved by exciting bulk acoustic waves piezoelectrically, which modulates the microring via stress-optical effect. The acoustic waves are confined tightly in a released SiO2 thin film which enhances the acoustic energy density and thus modulation efficiency.

  • Details
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Type
conference paper
DOI
10.1109/MEMS51782.2021.9375395
Web of Science ID

WOS:000667731600050

Author(s)
Tian, Hao
Liu, Junqiu  
Siddharth, Anat  
Blesin, Terence  
Kippenberg, Tobias J.  
Bhave, Sunil A.
Date Issued

2021-01-01

Publisher

IEEE

Publisher place

New York

Published in
2021 34Th Ieee International Conference On Micro Electro Mechanical Systems (Mems 2021)
ISBN of the book

978-1-6654-1912-3

Series title/Series vol.

Proceedings IEEE Micro Electro Mechanical Systems

Start page

210

End page

213

Subjects

Engineering, Electrical & Electronic

•

Engineering, Mechanical

•

Nanoscience & Nanotechnology

•

Engineering

•

Science & Technology - Other Topics

•

acousto-optic modulator

•

released hbar

•

si3n4 microring

•

silicon-nitride

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LPQM  
Event nameEvent placeEvent date
34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

ELECTR NETWORK

Jan 25-29, 2021

Available on Infoscience
July 31, 2021
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/180290
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