conference paper
Hybrid Si3N4-LiNbO3 integrated platform for electro-optic conversion
January 1, 2020
2020 Conference On Lasers And Electro-Optics (Cleo)
We demonstrate the integration of a Si3N4 Damascene photonic platform with thin-film lithium niobate on insulator (LNOI) via direct wafer bonding. This process enables fabrication of hybrid chi((2))-chi((3)) microresonators with Q similar to 10(6), as well as integrated travelling wave EO modulators. (c) 2020 The Author(s)
Type
conference paper
Web of Science ID
WOS:000612090003214
Author(s)
Hoenl, Simon
Moehl, Charles
Skehan, J. Connor
Caimi, Daniele
Seidler, Paul
Date Issued
2020-01-01
Publisher
Publisher place
New York
Published in
2020 Conference On Lasers And Electro-Optics (Cleo)
ISBN of the book
978-1-943580-76-7
Series title/Series vol.
Conference on Lasers and Electro-Optics
Start page
STh1F.3
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
San Jose, CA | May 10-15, 2020 | |
Available on Infoscience
March 26, 2021
Use this identifier to reference this record