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  4. Local Oxidation of Titanium Using Dynamic-Mode Tuning-Fork Probe with Microfabricated Silicon Cantilever
 
research article

Local Oxidation of Titanium Using Dynamic-Mode Tuning-Fork Probe with Microfabricated Silicon Cantilever

Suter, K.
•
Akiyama, T.  
•
de Rooij, N. F.  
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2006
Japanese Journal of Applied Physics

We present a unique probe that is based on a quartz tuning fork and a microfabricated cantilever. The probe is self-actuating and self-sensing. The cantilever can be tailored to the needs of specific applications, in this case to feature an electrically connected tip, in order to apply a potential to it. We investigate the usability of our probe with a tip for local oxidation experiments. We performed cyclic voltammetry to determine the bias voltage beyond which local anodic oxidation can happen. Our goal is to use this probe in a future scanning probe microscopy (SPM) lithography apparatus. © 2006 The Japan Society of Applied Physics.

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Type
research article
DOI
10.1143/JJAP.45.2099
Author(s)
Suter, K.
Akiyama, T.  
de Rooij, N. F.  
Staufer, U.
De Roou, N.F.  
Date Issued

2006

Published in
Japanese Journal of Applied Physics
Volume

45

Start page

2099

End page

2102

Note

375

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39929
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