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  4. Microstereolithography: a new process to build complex 3D objects
 
conference paper

Microstereolithography: a new process to build complex 3D objects

Courtois, B.
•
Crary, S. B.
•
Ehrfeld, W.
Show more
1999
Design, Test, and Microfabrication of MEMS and MOEMS
Conference on Design, Test, and Microfabrication of MEMS and MOEMS

In this paper, a new microstereolithography apparatus is described. It is an integral process in which a complete layer can be made in one exposure only, in contrast to vector-by-vector processes which are based on the vectorial tracing of each layer. As for most microstereolithography processes, complex objects can be realized by superimposing layers, each layer being obtained by a light-induced polymerization of a liquid resin. The vertical and transverse resolution of the process we are developping have been measured. Complex in shape objects have been realized :small 3D polymer components have been built such as turbines, microsprings, or micropipes. They are composed of a large number of layers with a resolution better than 5 mu m in the 3 directions of space. Some of these objects serve to demonstrate that complex in shape 3D objects can be manufactured with this technology. Sample structures which can be used in microfluidics, microrobotics or in the biomedical field are presented.

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Type
conference paper
DOI
10.1117/12.341277
Web of Science ID

WOS:000082111700089

Author(s)
Courtois, B.
Crary, S. B.
Ehrfeld, W.
Fujita, H.
Karam, J. M.
Markus, K.
Beluze, L.
Bertsch, Arnaud  
Renaud, Philippe  
Date Issued

1999

Published in
Design, Test, and Microfabrication of MEMS and MOEMS
Series title/Series vol.

SPIE Proceedings; 3680

Start page

808

End page

817

Subjects

microstereophotolithography

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS4  
Event nameEvent placeEvent date
Conference on Design, Test, and Microfabrication of MEMS and MOEMS

PARIS, FRANCE

MAR 30-APR 01, 1999

Available on Infoscience
September 13, 2005
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/216137
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