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research article

Comb Actuators for XY-Microstages

Jaecklin, V. P.
•
Linder, C.
•
de Rooij, N. F. 
more
1993
Sensors and Actuators A
Type
research article
DOI
10.1016/0924-4247(93)80185-J
Authors
Jaecklin, V. P.
•
Linder, C.
•
de Rooij, N. F. 
•
Moret, J.-M.
Publication date

1993

Published in
Sensors and Actuators A
Volume

39

Start page

83

End page

89

Note

91

Peer reviewed

REVIEWED

EPFL units
SAMLAB 
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39440