conference paper

MEMS Hotplates with TiN as a Heater Material

Cremer, J. F.
•
Briand, D.  
•
van der Vlist, W.
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2005
The 4th IEEE Conference on Sensors 2005
Type
conference paper
DOI
10.1109/ICSENS.2005.1597703
Author(s)
Cremer, J. F.
Briand, D.  
van der Vlist, W.
de Boer, C.
de Rooij, N. F.  
Zandbergen, H. W.
Sarro, P. M.
Date Issued

2005

Published in
The 4th IEEE Conference on Sensors 2005
Start page

330

End page

333

Editorial or Peer reviewed

NON-REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39169