conference paper
Suspended-Gate MOSFET: bringing new MEMS functionality into solid-state MOS transistor
2005
IEEE International Electron Device Meeting
Type
conference paper
Web of Science ID
WOS:000236225100247
Author(s)
Date Issued
2005
Published in
IEEE International Electron Device Meeting
Start page
479
End page
481
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
May 16, 2007
Use this identifier to reference this record