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  4. Integration of a microfluidic flow cell on a CMOS biosensor for DNA detection
 
conference paper

Integration of a microfluidic flow cell on a CMOS biosensor for DNA detection

Caboni, Alessandra
•
Barbaro, Massimo
•
Homsy, Alexandra  
Show more
2008
Proceedings of the Conference Phd Research In Microelectronics And Electronics
Conference on PhD Research in Microelectronics and Electronics

This paper describes the fabrication technique for the realization a microfluidic flow cell to be integrated on a CMOS biosensor for DNA hybridization detection. The main element of the microfluidic system is made in polydimethylsiloxane (PDMS) elastomer and takes up an area of 5 mm(2). PDMS is cast against a silicon master patterned by Deep Reactive Ion Etching (DRIE) and then bonded on the chip by means of oxygen plasma activation. The micro channels patterned in the flow cell are connected with capillary tubes that can be easily interconnected to a common syringe.

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Type
conference paper
DOI
10.1109/RME.2008.4595740
Author(s)
Caboni, Alessandra
Barbaro, Massimo
Homsy, Alexandra  
van der Wal, Peter  
Linder, Vincent
de Rooij, Nico  
Date Issued

2008

Publisher

IEEE Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa

Published in
Proceedings of the Conference Phd Research In Microelectronics And Electronics
Start page

121

End page

124

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
Event nameEvent placeEvent date
Conference on PhD Research in Microelectronics and Electronics

Istanbul, TURKEY

June 22-25, 2008

Available on Infoscience
April 7, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/49234
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