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  4. Double multiplication region configuration for near-infrared sensitivity enhancement in silicon cmos single-photon avalanche diodes
 
patent

Double multiplication region configuration for near-infrared sensitivity enhancement in silicon cmos single-photon avalanche diodes

Karaca, Utku  
•
Charbon, Edoardo  
•
Bruschini, Claudio  
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2024

A near-infrared sensitivity enhanced substrate non-isolated silicon single-photon avalanche diode is disclosed, comprising a p-well layer (101), a high-voltage n-well (102), the p-well layer and the high- voltage n-well layer positioned against each other and configured to form a main junction (100) defining an active area (104), the p- well layer comprising a doping according to a doping concentration distribution, the p-well layer being configured to have first double peaks in its doping concentration distribution throughout the p-well layer in the active area, corresponding to respective p-doped regions, and the high-voltage n-well being configured to have second double peaks, corresponding to respective n-doped regions configured to achieve a n-p-n-p type device junction profile, whereby further the p- well layer is lightly doped and configured to obtain a wide depletion region, i.e., at least 1 μm wide, the high-voltage n-well layer being further configured to extend beyond the p-well layer to form a guard ring (103) around the active area.

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Type
patent
EPO Family ID

86497400

Author(s)
Karaca, Utku  
Charbon, Edoardo  
Bruschini, Claudio  
Kizilkan, Ekin  
Issuers

École Polytechnique Fédérale de Lausanne

Note

Alternative title(s) : (fr) Configuration de zone de multiplication double pour l'amélioration de la sensibilité en proche infrarouge dans des diodes à avalanche à photon unique cmos au silicium

EPFL units
AVP-R-TTO  
IdentifierCountry codeKind codeDate issued

WO2024241211

WO

A1

2024-11-28

Available on Infoscience
February 3, 2025
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/246406
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