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Kim, B. J., Kim, G. M., Liebau, M., Huskens, J., Reinhoudt, D. N., & Brugger, J. (2001). SAMs meet MEMS - surface modification with self-assembled monolayers for the dry-demolding of photoplastic MEMS/NEMS. IEEE International Workshop on MEMS 2001, Interlaken, Switzerland, January 23 C.E. https://infoscience.epfl.ch/handle/20.500.14299/3362

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