NANOINGENEERING OF SIN MEMBRANES USING FIB

Santschi, Ch; Takano, N; van den Boogaart, M A F; Grogg, D; Danelon, Ch; Vogel, H; Brugger, J

report

Santschi, Ch

•

Takano, N

•

van den Boogaart, M A F

2005

Applications of thin SixNy membranes may be found in miscellaneous fields such as MEMS and NEMS as well as biotechnology. FIB is an excellent tool in order to realize nano-structures on membranes achieving the ultimate limits and rapid prototyping.

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Santschi, C., Takano, N., van den Boogaart, M. A. F., Grogg, D., Danelon, C., Vogel, H., & Brugger, J. (2005). NANOINGENEERING OF SIN MEMBRANES USING FIB. https://infoscience.epfl.ch/handle/20.500.14299/224133

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