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Brugger, J. (2004). Nanofabrication a Base de MEMS [Conference Presentation]. Entretiens Jacques Cartier - Nanotechnology: Nanofabrication and Nanodevices in Electronics and Photonics, Montreal, Canada, July 6 C.E. https://infoscience.epfl.ch/handle/20.500.14299/3844

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