conference presentation
Epitaxial Thin Films on Silicon for MEMS devices
2009
Type
conference presentation
Author(s)
Date Issued
2009
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Sorrento | March 25-27, 2009 | |
Available on Infoscience
January 25, 2010
Use this identifier to reference this record