conference paper
Establishment of a technology platform for epitaxial piezoelectric MEMS
2008
Proceedings of 22nd International Conference Eurosensors
Type
conference paper
Author(s)
Gariglio, S.
Sambri, A.
Stucki, N.
Triscone, J.-M.
Guy, F.
Baek, S.-H.
Eom, C.-B.
Reiner, J. W.
Date Issued
2008
Published in
Proceedings of 22nd International Conference Eurosensors
Volume
1
Start page
819
End page
822
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
| Event name | Event place | Event date |
Dresden, Germany | September 7-10, 2008 | |
Available on Infoscience
May 12, 2009
Use this identifier to reference this record