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conference paper

NEMS Need MEMS

Zickar, M.
•
Noell, W.  
•
Märki, I.
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2006
1st IEEE Int. Conf. on Nano/Micro Engineering and Molecular Systems
  • Details
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Type
conference paper
Author(s)
Zickar, M.
Noell, W.  
Märki, I.
Herzig, H. P.
Gullo, M.
Staufer, U.
Imer, R.
Guenat, O.
Koudelka-Hep, M.
de Rooij, N. F.  
Date Issued

2006

Published in
1st IEEE Int. Conf. on Nano/Micro Engineering and Molecular Systems
Volume

1

Start page

174

Editorial or Peer reviewed

NON-REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/40033
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