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research article

First principles investigation of defects at interfaces between silicon and amorphous high-kappa oxides

Broqvist, P.  
•
Pasquarello, Alfredo  
2007
Microelectronic Engineering

Experimental characterization is facing severe difficulties in elucidating the nature of defects at interfaces between silicon and amorphous high-kappa oxides. This motivates recourse to first principle simulation approaches based on density functional theory. A major issue for these approaches is the choice of the model structure. indeed, the most trivial choice of parent crystalline structures may fail in describing the amorphous nature of the oxide or the specific bonding arrangements occurring at the interface. A second critical issue relates to the determination of energy levels with respect to band edges of the semiconductor and the oxide, which often represent the only contact with experimental data. An improved description of the electronic structure is required going beyond standard density functional approaches that severely underestimate electronic band gaps. Here, these issues are illustrated by a comparative study of the oxygen vacancy in monoclinic HfO2, in amorphous HfO2, and at the Si-HfO2 interface.

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Type
research article
DOI
10.1016/j.mee.2007.04.075
Web of Science ID

WOS:000247378600043

Author(s)
Broqvist, P.  
Pasquarello, Alfredo  
Date Issued

2007

Published in
Microelectronic Engineering
Volume

84

Issue

9-10

Start page

2022

End page

2027

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
CSEA  
Available on Infoscience
October 8, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/43514
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