research article

Fabrication of silicon-on-insulator MEM resonators with deep sub-micron transduction gaps

Ciressan, Nicoleta Diana Badila  
•
Hibert, Cyrille  
•
Mazza, Marco  
Show more
2007
Microsystem Technologies
Loading...
Thumbnail Image
Name

542_2006_Article_349.pdf

Type

Publisher's Version

Version

http://purl.org/coar/version/c_970fb48d4fbd8a85

Access type

openaccess

Size

507.86 KB

Format

Adobe PDF

Checksum (MD5)

0ed998f6255de47c68c42d71860ae7eb