conference paper
Nano-Electro-Mechanical vibrating body FET resonator for high frequency integrated oscillators
2010
Device Research Conference - Conference Digest, DRC
Mechanical resonators are attractive for many applications in signal processing and sensing applications [1]. However, the aggressive scaling of their dimensions into the nanometer range with a simultaneous increase of the resonance frequency makes their direct measurement extremely difficult with electrostatic transduction, due to the very low signal level. Novel current modulation mechanisms, such as the FET based detection [2,3,4] and piezoresistive [5,6] current modulation, demonstrated the most promising results for highly sensitive motion detection in Nano-Electro-Mechanical (NEM) resonators. © 2010 IEEE.
Type
conference paper
Author(s)
Date Issued
2010
Published in
Device Research Conference - Conference Digest, DRC
Start page
183
End page
184
Editorial or Peer reviewed
NON-REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
November 8, 2010
Use this identifier to reference this record