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  4. Photoplastic shadow-masks for rapid resistless multi-layer micropatterning
 
conference paper

Photoplastic shadow-masks for rapid resistless multi-layer micropatterning

Kim, G M  
•
Kim, B J
•
Brugger, J  
2001
Proceedings of 11th International Conference on Solid-State Sensors and Actuators (Transducers ’01) and Eurosensors XV
11th International Conference on Solid-State Sensors and Actuators (Transducers ’01) and Eurosensors XV

not available

  • Details
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Type
conference paper
DOI
10.1007/978-3-642-59497-7_379
Author(s)
Kim, G M  
Kim, B J
Brugger, J  
Date Issued

2001

Published in
Proceedings of 11th International Conference on Solid-State Sensors and Actuators (Transducers ’01) and Eurosensors XV
Start page

1632

End page

1635

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
LMIS1  
Event nameEvent placeEvent date
11th International Conference on Solid-State Sensors and Actuators (Transducers ’01) and Eurosensors XV

Munich, Germany

10-14 June, 2001

Available on Infoscience
April 13, 2007
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/4642
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