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research article

Microcolumn design for a large scan field and pixel number

Weigand, H.
•
Gautsch, S.  
•
Strohmaier, W.
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2009
Journal of Vacuum Science & Technology B

A different approach in microcolumn design is presented, aiming at a large number of pixels at minimal probe size for the deflected beam. An optimization routine resulted in a seven times magnifying column featuring a more than 7×7 mm2 scan field at 40 mm working distance. Simulations for 1 keV electrons from a field emission source predict an increase in beam size from 85 nm on axis up to only about 200 nm for a beam deflected 3 mm off axis. Within a 1 mm scan field this microcolumn could address over 100 Mpixels of less than 100 nm in size. Tests of this design using the 130 nm electron probe of a scanning electron microscope as the electron source resulted in a beam size of ~930 nm on axis up to ~1000 nm for a beam deflected 3 mm off axis.

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Type
research article
DOI
10.1116/1.3256265
Web of Science ID

WOS:000272803400045

Author(s)
Weigand, H.
Gautsch, S.  
Strohmaier, W.
Fleischer, M.
Staufer, U.
de Rooij, N.F.  
Kern, D.P.
Date Issued

2009

Published in
Journal of Vacuum Science & Technology B
Volume

27

Start page

2542

End page

2546

Subjects

field emission

•

micromechanical devices

•

scanning electron microscopy

•

Lithography

•

Size

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
Available on Infoscience
January 21, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/45779
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