High-resolution microscopy and photolithography devices using focusing micromirrors
The invention relates to large-field high-resolution microscopy and photolithography setups operating with polychromatic light. It includes the use of a plurality of focusing micromirrors.
Cite this item
Rachet, B., Merenda, F., & Salathe, R. (2010). High-resolution microscopy and photolithography devices using focusing micromirrors (Patent No. EP2389606). https://infoscience.epfl.ch/handle/20.500.14299/118397
Click Copy to copy the citation, or select the text manually.
42145093
Alternative title(s) : (de) Hochauflösende mikroskopie- und photolithographievorrichtungen mit fokussierenden mikrospiegeln (fr) Microscopie haute résolution et dispositifs de photolithographie utilisant des miroirs microscopiques de focalisation
TTO:6.0877
| Identifier | Country code | Kind code | Date issued |
EP2389606 | EP | B1 | 2019-08-28 |
US2016091799 | US | A1 | 2016-03-31 |
US9075227 | US | B2 | 2015-07-07 |
US2011300490 | US | A1 | 2011-12-08 |
EP2389606 | EP | A2 | 2011-11-30 |
WO2010084478 | WO | A3 | 2010-10-28 |
WO2010084478 | WO | A2 | 2010-07-29 |