conference paper
AFM benchmark for the profile characterization of subwavelength diffractive elements within the EC Network of Excellence on Micro-Optics NEMO
2006
Optical Micro- and Nanometrology in Microsystems Technology
Type
conference paper
Author(s)
Destouches, N.
Nakagawa, W.
Ottevaere, H.
Pietarinen, J.
Reynaud, S.
Tervo, J.
Tonchev, S.
Turunen, J.
Kujawinska, M.
Date Issued
2006
Published in
Optical Micro- and Nanometrology in Microsystems Technology
Series title/Series vol.
Proc. SPIE; 6188
Start page
61881K
Written at
OTHER
EPFL units
Available on Infoscience
April 22, 2009
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