Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Ultrasonic flexural Lamb-wave actuators based on PZT thin film
 
research article

Ultrasonic flexural Lamb-wave actuators based on PZT thin film

Luginbuhl, P.
•
Collins, S. D.
•
Racine, G. A.
Show more
1998
Sensors and Actuators A: Physical

The fabrication and characterization of a microfabricated acoustic Lamb-wave device driven by a piezoelectric PZT (modified lead zirconate titanate Pb(Zr-x,Ti1-x)O-3) sol-gel thin film for use in mass-transport, mass-filtering and fluid-delivery systems are presented. Ultrasonic flexural plate waves (FPWs) at frequencies of the order of megahertz are generated and detected in a thin acoustic composite membrane by using two interdigitated transducers (IDTs) patterned on a 0.75 mu m thick piezoelectric ceramic PZT film, which provides high acoustic power for physical translation of fluid and microparticles. (C) 1998 Elsevier Science S.A.

  • Details
  • Metrics
Type
research article
DOI
10.1016/S0924-4247(98)80056-3
Web of Science ID

WOS:000071029100006

Author(s)
Luginbuhl, P.
Collins, S. D.
Racine, G. A.
Gretillat, M. A.
de Rooij, N. F.
Brooks, K. G.
Setter, N.  
Date Issued

1998

Published in
Sensors and Actuators A: Physical
Volume

64

Issue

1

Start page

41

End page

49

Subjects

flexural plate waves

•

lamb waves

•

lead zirconate titanate

•

ultrasonic actuators

•

microsensors

Note

Luginbuhl, P Univ Neuchatel, Inst Microtechnol, Rue Jaquet Droz 1,POB 3, CH-2007 Neuchatel, Switzerland Univ Neuchatel, Inst Microtechnol, CH-2007 Neuchatel, Switzerland Ecole Polytech Fed Lausanne, Swiss Fed Inst Technol, Lab Ceram MXD, Ecublens, CH-1015 Lausanne, Switzerland

Ym107

Cited References Count:9

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
August 21, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/233338
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés