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  4. Self-Assembled Nano-Electro-Mechanical Tri-state Carbon Nanotube Switches for Reconfigurable Integrated Circuits
 
conference paper

Self-Assembled Nano-Electro-Mechanical Tri-state Carbon Nanotube Switches for Reconfigurable Integrated Circuits

Cao, J.  
•
Vitale, Wolfgang Amadeus  
•
Ionescu, A. M.  
2012
2012 Ieee 25Th International Conference On Micro Electro Mechanical Systems (Mems)
IEEE MEMS 2012

We report, for the first time, self-assembled cantilever and clamped-clamped tri-state carbon nanotube (T-CNT) nano-electro-mechanical (NEM) switches with sub-100 nm air-gap dual lateral gates. Unlike conventional bi-state CNT switches, the T-CNT NEM switches operate in three states: CNT in the center (OFF), CNT attracted to the left gate (ON-1) or to the right gate (ON-2). They demonstrate excellent sensing current windows (I-on/I-off similar to 10(7)), ultra-low I-off (similar to 10(-14)A), good isolation and high endurance (cycle>10(2)). The proposed hysteretic switches offer a complementary metal-oxide-semiconductor (CMOS) - compatible bottom-up approach for various potential applications: logic devices, memories, etc., with higher circuit density and novel ultra-scaled configurability functions.

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Type
conference paper
DOI
10.1109/MEMSYS.2012.6170148
Web of Science ID

WOS:000312912800048

Author(s)
Cao, J.  
Vitale, Wolfgang Amadeus  
Ionescu, A. M.  
Date Issued

2012

Publisher

Ieee

Publisher place

New York

Published in
2012 Ieee 25Th International Conference On Micro Electro Mechanical Systems (Mems)
ISBN of the book

978-1-4673-0325-5

Total of pages

4

Start page

188

End page

191

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Event nameEvent placeEvent date
IEEE MEMS 2012

Paris

Jan. 29-Feb. 2, 2012

Available on Infoscience
January 4, 2012
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/76334
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