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  4. Thick Polymer-AlScN Integrated PMUT with Optimized Transceiver Design by DOE Approach
 
conference paper

Thick Polymer-AlScN Integrated PMUT with Optimized Transceiver Design by DOE Approach

Namnabat, Mohammadsadegh  
•
Rocha, Rodrigo Tumolin
•
Guillermo Villanueva, Luis  
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September 15, 2025
2025 IEEE International Ultrasonics Symposium (IUS)
2025 IEEE International Ultrasonics Symposium

To enhance air-coupled piezoelectric micromachined ultrasonic transducers (PMUTs) performance, the substitution of the traditional silicon structural layer with a 40 µm-thick polymer (Parylene-C) coupled with aluminum scandium nitride (AlSc30%N) is proposed as a transformative solution leading to 12.8% increase in the sound pressure level (SPL) and boost the total generated charge by 2.8-fold compared to conventional Si-based PMUTs. The finite element (FE) method coupled with statistical design of experiment (DOE) is utilized to optimize the transducer’s performance. The DOE is conducted in two steps. First, a screening step evaluates the impact of line/radial slit patterns, clamp configuration, and shape of the resonant membrane on device transmission/reception sensitivity. Second, an optimization step uses response surface methodology (RSM), based on three key factors selected from the previous screening. In RSM, a second-order polynomial model is fitted to round-trip sensitivity, and a central composite design is used to explore the design space. DOE screening indicates the optimal configuration improves reception by 30% with a 3.4 dB lower transmission and 8% smaller footprint. The quadratic model (RMSE=0.38, R2= 0.84) indicates that decreasing clamp radial width and increasing the number of radial slits enhance round-trip sensitivity.

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Type
conference paper
DOI
10.1109/ius62464.2025.11201315
Author(s)
Namnabat, Mohammadsadegh  

École Polytechnique Fédérale de Lausanne

Rocha, Rodrigo Tumolin
Guillermo Villanueva, Luis  

École Polytechnique Fédérale de Lausanne

De Pastina, Annalisa
Date Issued

2025-09-15

Publisher

IEEE

Published in
2025 IEEE International Ultrasonics Symposium (IUS)
ISBN of the book

979-8-3315-2332-9

Subjects

Polymer-based Piezoelectric micromachined ultrasonic transducers (PMUTs)

•

FE simulation

•

Statistical DOE analysis

•

Microelectromechanical devices (MEMS)

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NEMS  
Event nameEvent acronymEvent placeEvent date
2025 IEEE International Ultrasonics Symposium

IUS 2025

Utrecht, Netherlands

2025-09-15 - 2025-09-18

FunderFunding(s)Grant NumberGrant URL

Silicon Austria Labs

Available on Infoscience
October 22, 2025
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/255175
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