Integrated Nickel Micro-Nano-Hall Sensors on SU-8 Cantilevers for Scanning Hall Probe Microscopy

Mouaziz, S.; Imboden, C.; Santschi, C.; Vazquez Mena, O.; Popovic, R.; Brugger, J.; Boero, G.

doi:10.1109/SENSOR.2007.4300701

conference paper

Integrated Nickel Micro-Nano-Hall Sensors on SU-8 Cantilevers for Scanning Hall Probe Microscopy

Mouaziz, S.

•

Imboden, C.

•

Santschi, C.

2007

Transducers '07 & Eurosensors XXI, Digest Of Technical Papers

14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’07)

We report the fabrication and characterization of nickel Hall sensors integrated on SU-8 cantilevers. Sensors having active area down to 1x1 μm 2 show a magnetic field resolution better than 1μT/Hz 1/2 in the thermal noise frequency range. The fabricated devices have been tested for magnetic imaging using the scanning Hall probe microscopy technique.

Cite this item

Mouaziz, S., Imboden, C., Santschi, C., Vazquez Mena, O., Popovic, R., Brugger, J., & Boero, G. (2007). Integrated Nickel Micro-Nano-Hall Sensors on SU-8 Cantilevers for Scanning Hall Probe Microscopy. Transducers ’07 & Eurosensors XXI, Digest of Technical Papers, 2589–2592. https://doi.org/10.1109/SENSOR.2007.4300701

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