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  4. Micro-Electro-Mechanical Switch Based on Suspended Horizontal Dense Mat of CNTs by FIB Nanomanipulation
 
conference paper

Micro-Electro-Mechanical Switch Based on Suspended Horizontal Dense Mat of CNTs by FIB Nanomanipulation

Acquaviva, D.  
•
Arun, A.
•
Smajda, R.  
Show more
2009
Procedia Chemistry
23rd Eurosensors Conference

The paper presents the carbon nanotubes (CNTs) alignment and length dependence with respect to the catalyst pattern design, the fabrication of a CNT MEM switch, nanomanipulating a CNT array by FIB and the electrical characterization of the device to evaluate the electrical and mechanical properties of the CNT membrane. The catalyst design permits to obtain, during the same growth process, both vertical and horizontal aligned nanotubes. The high density guaranties to the CNT mat to act as a compact and flexible material that could be manipulated to make MEM devices. DC electrical measurements of the CNT MEM switch show an equivalent resistivity of 0.08 Omega cm and a Young Modulus of 160MPa that permit to have low actuation voltage devices in the downscaling process.

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Type
conference paper
DOI
10.1016/j.proche.2009.07.352
Web of Science ID

WOS:000275995600138

Author(s)
Acquaviva, D.  
Arun, A.
Smajda, R.  
Grogg, D.
Magrez, A.  
Skotnicki, T.
Ionescu, A. M.  
Date Issued

2009

Publisher

Elsevier Science, Reg Sales Off, Customer Support Dept, 655 Ave Of The Americas, New York, Ny 10010 Usa

Published in
Procedia Chemistry
Series title/Series vol.

Procedia Chemistry

Volume

1

Issue

1

Start page

1411

End page

1414

Subjects

Catalyst dimension

•

CNT growth

•

FIB Nanomanipulation

•

CNT MEM Switch

•

Carbon

•

Memory

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
LNNME  
CMI  
Event nameEvent placeEvent date
23rd Eurosensors Conference

Lausanne, SWITZERLAND

Sep 06-09, 2009

Available on Infoscience
November 8, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/57209
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