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  4. Closed-loop control of laser assisted chemical vapor deposition growth of carbon nanotubes
 
research article

Closed-loop control of laser assisted chemical vapor deposition growth of carbon nanotubes

Van De Burgt, Yoeri
•
Bellouard, Yves  
•
Mandamparambil, Rajesh
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2012
Journal of Applied Physics

Laser-assisted chemical vapor deposition growth is an attractive mask-less process for growing locally aligned nanotubes in selected places on temperature sensitive substrates. An essential parameter for a successful and reproducible synthesis of nanotubes is the temperature during growth. Here, we demonstrate a temperature feedback control mechanism based on the dynamic, in situ monitoring of the infrared radiation coupled with reflectivity information. With the information provided by these sensors, an infrared laser, focused on a silicon substrate covered with aluminum-oxide and iron catalyst layers, can be controlled. The growth takes place in a gaseous mixture of argon (carrier gas), hydrogen (process gas), and ethylene (carbon-containing gas). Scanning electron microscopy and Raman spectroscopy analysis demonstrate the excellent reproducibility of the closed-loop control process over multiple experiments. Furthermore, we developed a unique method to identify the onset for catalyst formation and activation by monitoring the fluctuation of the reflected laser beam.

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Type
research article
DOI
10.1063/1.4745874
Author(s)
Van De Burgt, Yoeri
Bellouard, Yves  
Mandamparambil, Rajesh
Haluska, Miro
Dietzel, Andreas
Date Issued

2012

Publisher

American Institute of Physics

Published in
Journal of Applied Physics
Volume

112

Issue

3

Article Number

034904

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
GALATEA  
Available on Infoscience
July 20, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/116447
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