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research article

Micro-hotplates on polyimide for sensors et actuators

Briand, D.  
•
Colin, S.
•
Gangadharaiah, A.  
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2006
Sensors and Actuators A: Physical
  • Details
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Type
research article
DOI
10.1016/j.sna.2006.06.003
Web of Science ID

WOS:000242126800048

Author(s)
Briand, D.  
Colin, S.
Gangadharaiah, A.  
Vela, E.
Dubois, P.  
Thiery, L.
de Rooij, N. F.  
Date Issued

2006

Published in
Sensors and Actuators A: Physical
Volume

132

Start page

317

End page

324

Note

383

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39062
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