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Mems-enabled Silicon Photonic Integrated Devices and Circuits

Quack, Niels  
•
Sattari, Hamed  
•
Takabayashi, Alain Yuji  
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December 1, 2025
IEEE Journal Of Quantum Electronics

Photonic integrated circuits have seen a dramatic increase in complexity over the past decades. This development has been spurred by recent applications in datacenter communications and enabled by the availability of standardized mature technology platforms. Mechanical movement of wave-guiding structures at the micro-and nanoscale provides unique opportunities to further enhance functionality and to reduce power consumption in photonic integrated circuits. We here demonstrate integration of MEMS-enabled components in a simplified silicon photonics process based on IMEC's Standard iSiPP50G Silicon Photonics Platform and a custom release process.

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10.1109_jqe.2025.3640476.pdf

Type

Main Document

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Published version

Access type

openaccess

License Condition

CC BY

Size

3.77 MB

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Adobe PDF

Checksum (MD5)

e066aec57e5e4035806032919c1ab05a

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