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research article

Miniature lamellar grating interferometer based on silicon technology

Manzardo, O.
•
Michaely, R.
•
Schädelin, F.
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2004
Optics Letters

We present a lamellar grating interferometer realized with microelectromechanical system technology. It is used as a time-scanning Fourier-transform spectrometer. The motion is carried out by an electrostatic comb drive actuator fabricated by silicon micromachining, particularly by silicon-on-insulator technology. For the first time to our knowledge, we measure the spectrum of an extended white-light source with a resolution of 1.6 nm at a wavelength of 400 nm and of 5.5 nm at 800 nm. The wavelength accuracy is better than 0.5 nm, and the inspected wavelength range extends from 380 to 1100 nm. The optical path difference maximum is 145 μm. The dimensions of the device are 5 mm × 5 mm. © 2004 Optical Society of America.

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Type
research article
DOI
10.1364/OL.29.001437
Author(s)
Manzardo, O.
Michaely, R.
Schädelin, F.
Noell, W.
Overstolz, T.
de Rooij, N. F.  
Herzig, H. P.  
Date Issued

2004

Published in
Optics Letters
Volume

29

Start page

1437

End page

1439

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

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Available on Infoscience
April 22, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/37936
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