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  4. Clamp-Tapering Increases the Quality Factor of Stressed Nanobeams
 
research article

Clamp-Tapering Increases the Quality Factor of Stressed Nanobeams

Bereyhi, Mohammad. J.
•
Beccari, Alberto  
•
Fedorov, Sergey A.  
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April 1, 2019
Nano Letters

Stressed nanomechanical resonators are known to have exceptionally high quality factors (Q) due to the dilution of intrinsic dissipation by stress. Typically, the amount of dissipation dilution and thus the resonator Q is limited by the high mode curvature region near the clamps. Here we study the effect of clamp geometry on the Q of nanobeams made of high-stress Si3N4. We find that tapering the beam near the clamps, thus locally increasing the stress, leads to an increased Q of MHz-frequency low order modes due to enhanced dissipation dilution. Contrary to recent studies of tethered-membrane resonators, we find that widening the clamps leads to a decreased Q despite increased stress in the beam bulk. The tapered-clamping approach has practical advantages compared to the recently developed "soft-clamping" technique, as it enhances the Q of the fundamental mode and can be implemented without increasing the device size.

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Type
research article
DOI
10.1021/acs.nanolett.8b04942
Web of Science ID

WOS:000464769100017

Author(s)
Bereyhi, Mohammad. J.
Beccari, Alberto  
Fedorov, Sergey A.  
Ghadimi, Amir H.  
Schilling, Ryan  
Wilson, Dalziel J.  
Engelsen, Nils J.  
Kippenberg, Tobias J.  
Date Issued

2019-04-01

Publisher

AMER CHEMICAL SOC

Published in
Nano Letters
Volume

19

Issue

4

Start page

2329

End page

2333

Subjects

Chemistry, Multidisciplinary

•

Chemistry, Physical

•

Nanoscience & Nanotechnology

•

Materials Science, Multidisciplinary

•

Physics, Applied

•

Physics, Condensed Matter

•

Chemistry

•

Science & Technology - Other Topics

•

Materials Science

•

Physics

•

nanomechanical resonators

•

clamp geometry

•

tapered-clamping

•

silicon nitride

•

quality factor

•

resonators

•

radiation

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LPQM  
Available on Infoscience
June 18, 2019
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/157162
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