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research article

A novel approach to high-speed high-resolution on-chip mass sensing

Kauth, C.  
•
Pastre, M.  
•
Kayal, M.  
2014
Microelectronics Journal

The state-of-the-art mass sensing so far has been rather developed along the resolution axis, reaching atomic-scale detection, than into the direction of high-speed. This paper reports a novel self-calibrating technique, making high-speed inertial mass sensors capable of instant high-resolution particle detection and weighing. The sensing nanoelectromechanical resonator is embedded into a phase-locked loop and the sensor-inherent nonlinear phase-frequency relation is exploited for auto-calibration. A tunable on-chip carbon nanotube based mass balance serves as a case study of small-size and low-cost environmental and healthcare applications. Tunability and a phase-locked loop topology make the system widely universal and invariant to nanotube characteristics. Operational for tube eigenfrequencies up to 385 MHz, the circuit integration in a 180 nm technology achieves instantaneous zeptogram resolution, while yoctogram precision is obtained within the tenth of a second. These figures of merit range at the physical limits of carbon nanotube resonators, in both mass- and time-resolution. (C) 2014 Elsevier Ltd. All rights reserved

  • Details
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Type
research article
DOI
10.1016/j.mejo.2014.07.004
Web of Science ID

WOS:000345642300010

Author(s)
Kauth, C.  
Pastre, M.  
Kayal, M.  
Date Issued

2014

Publisher

Elsevier Sci Ltd

Published in
Microelectronics Journal
Volume

45

Issue

12

Start page

1648

End page

1655

Subjects

Analytical models

•

Carbon nanotubes

•

Closed loop systems

•

Nanoelectromechanical systems

•

Nonlinear systems

•

Oscillators

•

Phase locked loops

•

System analysis and design

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
GR-KA  
Available on Infoscience
February 20, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/111526
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