Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Micro-fabrication of high-thickness spiral inductors for the remote powering of implantable biosensors
 
research article

Micro-fabrication of high-thickness spiral inductors for the remote powering of implantable biosensors

Olivo, Jacopo  
•
Carrara, Sandro  
•
De Micheli, Giovanni  
2014
Microelectronic Engineering

A micro-fabrication process is proposed to realize high-thickness spiral inductors for the remote powering of implantable biosensors through inductive link. The process is suitable for different substrates, such as silicon and Pyrex, and enables the fabrication of the receiving inductor directly on the implantable system. The use of Ordyl Alpha960 is explored to achieve high-thickness structures. Ordyl is a dry film, negative photoresist that enables high-thickness mold (starting from 60 p.m) with a single-layer deposition. Copper spiral inductors with a trace thickness of 60 pm are fabricated on silicon and tested. These inductors can receive up to 8.7 mW, with a link efficiency of 25%, over a distance of 6 mm from the transmitter. Tested within a real setup, these inductors enable bidirectional data communication with the external transmitter. Downlink communication (ASK) is successfully tested at 100 kbps. Uplink communication (LSK) is successfully tested at 66.6 kbps. (C) 2013 Elsevier B.V. All rights reserved.

  • Files
  • Details
  • Metrics
Loading...
Thumbnail Image
Name

1-s2.0-S0167931713005650-main.pdf

Access type

openaccess

Size

1.18 MB

Format

Adobe PDF

Checksum (MD5)

ba17750c168e03ed01b59a5195fff9ea

Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés