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research article

Fabrication and characterization of NbTi microwave superconducting resonators

Russo, Roberto  
•
Chatel, Andre  
•
Solmaz, Nergiz Sahin  
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June 1, 2023
Micro And Nano Engineering

Superconducting resonators are widely used in fields spanning from quantum computing to electron spin resonance (ESR) spectroscopy. With the goal of realizing superconducting resonators, a broad variety and combination of superconducting materials, substrates and fabrication processes have been used and thoroughly reported in the literature. High temperature superconductors such as YBCO and low temperature superconductors such as Nb, NbN, NbTiN and Al are the major actors in the domain. In this work, we investigate the possibility to extend the family of suitable low temperature superconductors for the realization of planar superconducting microwave resonators for future ESR applications. In particular, this study focuses on NbTi, a widely used material to realize superconducting cables but not investigated for planar resonating structures at GHz frequencies. A 150 nm thick film of NbTi is sputtered and patterned on top of an Al2O3 substrate. For devices resonating around 6.8 GHz quality factors greater than 10,000 are observed at 3 K and in magnetic fields up to 250 mT.

  • Details
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Type
research article
DOI
10.1016/j.mne.2023.100203
Web of Science ID

WOS:001043793000001

Author(s)
Russo, Roberto  
Chatel, Andre  
Solmaz, Nergiz Sahin  
Farsi, Reza  
Furci, Hernan  
Brugger, Juergen  
Boero, Giovanni  
Date Issued

2023-06-01

Publisher

ELSEVIER

Published in
Micro And Nano Engineering
Volume

19

Article Number

100203

Subjects

Engineering, Electrical & Electronic

•

Nanoscience & Nanotechnology

•

Materials Science, Multidisciplinary

•

Optics

•

Physics, Applied

•

Engineering

•

Science & Technology - Other Topics

•

Materials Science

•

Optics

•

Physics

•

superconducting resonators

•

nbti

•

microfabrication

•

direct photolitography

•

ion beam etching

•

thin-film

•

dielectric-properties

•

sensitivity

•

sapphire

•

devices

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

Available on Infoscience
August 28, 2023
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/200082
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