book part or chapter
Micro-optics
2005
Optical MEMS
Type
book part or chapter
Author(s)
Cumme, Matthias
Wittig, Lars C.
Herzig, Hans Peter
Kley, Ernst-Bernhard
Date Issued
2005
Publisher
Publisher place
Bellingham
Published in
Optical MEMS
Start page
75
End page
120
Written at
OTHER
EPFL units
Available on Infoscience
April 22, 2009
Use this identifier to reference this record