conference paper
Fabrication of an active nanostencil with intergrated microshutters
2003
Proceedings of 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’03)
not available
Cite this item
Tjerkstra, R. W., Ekkels, P., Krijnen, G., Egger, S., Berenschot, E., Ma, K. C., & Brugger, J. (2003). Fabrication of an active nanostencil with intergrated microshutters. Proceedings of 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’03), 2, 1651–1654. https://doi.org/10.1109/SENSOR.2003.1217099
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Type
conference paper
Author(s)
Date Issued
2003
Published in
Proceedings of 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’03)
Volume
2
Start page
1651
End page
1654
Editorial or Peer reviewed
NON-REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Boston, USA | 8-12 June, 2003 | |
Available on Infoscience
April 13, 2007
Use this identifier to reference this record