conference paper
Fabrication of an active nanostencil with intergrated microshutters
2003
Proceedings of 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’03)
not available
Type
conference paper
Author(s)
Date Issued
2003
Published in
Proceedings of 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’03)
Volume
2
Start page
1651
End page
1654
Editorial or Peer reviewed
NON-REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Boston, USA | 8-12 June, 2003 | |
Available on Infoscience
April 13, 2007
Use this identifier to reference this record