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  4. Physical Principle of Spark Assisted Chemical Micro-Etching of Glass
 
conference presentation

Physical Principle of Spark Assisted Chemical Micro-Etching of Glass

Bleuler, Hannes  
•
Wüthrich, Rolf
2004
International workshop on micromechatronics and micro and nano fabrication
  • Details
  • Metrics
Type
conference presentation
Author(s)
Bleuler, Hannes  
Wüthrich, Rolf
Date Issued

2004

Subjects

SACE

•

glass micro-machining

•

microengineering

•

robotics

•

[SACE]

Note

Invited Plenary lecture

Written at

EPFL

EPFL units
LSRO  
Event nameEvent placeEvent date
International workshop on micromechatronics and micro and nano fabrication

Karlsruhe (Germany)

October 5th and 6th, 2004

Available on Infoscience
June 6, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/230311
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