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  4. Design and Fabrication of a Prototype Actuator for Fourier Transform Interferometry
 
research article

Design and Fabrication of a Prototype Actuator for Fourier Transform Interferometry

Melpignano, G. G.
•
Schaap, A.
•
Bellouard, Yves  
2014
Progress in Optomechatronic Technologies

The design, fabrication and characterisation of an uniaxial scanning mirror component for interferometry applications is presented. The device is fabricated in fused silica by means of femtosecond laser irradiation and a selective etching step. The fabricated actuator produces bidirectional, repeatable sinusoidal motion with a displacement (200 μm) larger than the wavelengths under investigation (300–700 nm), rendering it suitable for application within an interferometry setup. This indicates that future fabrication of fully integrated interferometer measurement devices in fused silica are realisable.

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Type
research article
DOI
10.1007/978-3-319-05711-8_10
Author(s)
Melpignano, G. G.
Schaap, A.
Bellouard, Yves  
Date Issued

2014

Published in
Progress in Optomechatronic Technologies
Volume

306

Start page

97

End page

105

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
GALATEA  
Available on Infoscience
July 20, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/116407
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