conference paper

Uniform Tilt-Angle Micromirror Array for Multi Object Spectroscopy

Waldis, S.
•
Clerc, P.-A.
•
Zamkostian, F.
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2007
MOEMS and Miniaturized Systems VI
MOEMS-MEMS 2007 Micro and Nanofabrication
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waldis_pw07_6466-2.pdf

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