conference paper

Silicon nanowires patterning by sidewall and nano-oxidation processing

Pott, V.  
•
Grogg, D.
•
Brugger, J.
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2005
Nanoelectronics Days 2005
Type
conference paper
Author(s)
Pott, V.  
Grogg, D.
Brugger, J.
Ionescu, A. M.  
Date Issued

2005

Published in
Nanoelectronics Days 2005
Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Available on Infoscience
May 16, 2007
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/6959