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research article

Wafer-Level Hysteresis-Free Resonant Carbon Nanotube Transistors

Cao, Ji
•
Bartsch, Sebastian T.
•
Ionescu, Adrian M.  
2015
Acs Nano

We report wafer-level fabrication of resonant-body, carbon nanotube (CNT)field-effect transistors (FETs) in a dual-gate configuration. An integration density of >10(6) CNTFETs/cm(2), an assembly yield of >80%, and nanoprecision have been simultaneously obtained. Through combined chemical and thermal treatments, hysteresis-free (in vacuum) suspended-body CNTFETs have been demonstrated. Electrostatic actuation by lateral gate and FET-based readout of mechanical-resonance have been achieved at room temperature. Both upward and downward in situ frequency tuning has been experimentally demonstrated in the dual-gate architecture. The minuscule mass, high resonance frequency, and in situ tunability of the resonant CNTFETs offer promising features for applications in radio frequency signal processing and ultrasensitive sensing.

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Type
research article
DOI
10.1021/nn506817y
Web of Science ID

WOS:000351791800058

Author(s)
Cao, Ji
Bartsch, Sebastian T.
Ionescu, Adrian M.  
Date Issued

2015

Publisher

Amer Chemical Soc

Published in
Acs Nano
Volume

9

Issue

3

Start page

2836

End page

2842

Subjects

carbon nanotube

•

wafer-scale fabrication

•

nanoprecision

•

field-effect transistors

•

resonators

•

hysteresis-free

•

in situ tuning

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

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Available on Infoscience
May 29, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/114553
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