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  4. Integration of a Fabrication Process for an Aluminum Single-Electron Transistor and a Scanning Force Probe for Tuning-Fork-Based Probe Microscopy
 
research article

Integration of a Fabrication Process for an Aluminum Single-Electron Transistor and a Scanning Force Probe for Tuning-Fork-Based Probe Microscopy

Suter, Kaspar
•
Akiyama, Terunobu  
•
de Rooij, Nicolaas F.  
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2010
Journal of Microelectromechanical Systems

In this paper, we report on the integration technique and fabrication of a scanning probe interrogating the location of charges and their tracks inside quantum devices. Our unique approach is to pattern the charged sensor into a high topography micromechanical structure. A single-electron transistor (SET) is directly integrated onto the microfabricated cantilever that extends out from the body of a scanning force microscope (SFM) probe of standard dimensions. In a novel tactic and by reversing their traditional roles, a tuning fork (TF) completes the probe to provide the self-actuating and self-sensing qualities necessary for an oscillatory force sensor. We show sharp edges on the Coulomb diamonds, indication that the SET fabrication step yields devices of high quality. We demonstrate topographical scans with this probe. All stages of the fabrication process are executed on batches of probes which is an essential step away from the time-consuming and individual preparation of other implementations. It opens the door to a more reproducible and large volume production.

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Type
research article
DOI
10.1109/JMEMS.2010.2067198
Web of Science ID

WOS:000283369500008

Author(s)
Suter, Kaspar
Akiyama, Terunobu  
de Rooij, Nicolaas F.  
Huefner, Magdalena
Ihn, Thomas
Staufer, Urs
Date Issued

2010

Publisher

Institute of Electrical and Electronics Engineers

Published in
Journal of Microelectromechanical Systems
Volume

19

Issue

5

Start page

1088

End page

1097

Subjects

Electron beam lithography (EBL)

•

micromachining

•

microscopy

•

nanolithography

•

single-electron transistor (SET)

•

Small Tunnel-Junctions

•

Coulomb-Blockade

•

Temperature

•

Cantilever

•

Sensor

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
Available on Infoscience
October 11, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/55344
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