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research article

Compensator design for improved counterbalancing in high speed atomic force microscopy

Bozchalooi, I. S.
•
Youcef-Toumi, K.
•
Burns, D. J.
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2011
Review of Scientific Instruments

High speed atomic force microscopy can provide the possibility of many new scientific observations and applications ranging from nano-manufacturing to the study of biological processes. However, the limited imaging speed has been an imperative drawback of the atomic force microscopes. One of the main reasons behind this limitation is the excitation of the AFM dynamics at high scan speeds, severely undermining the reliability of the acquired images. In this research, we propose a piezo based, feedforward controlled, counter actuation mechanism to compensate for the excited out-of-plane scanner dynamics. For this purpose, the AFM controller output is properly filtered via a linear compensator and then applied to a counter actuating piezo. An effective algorithm for estimating the compensator parameters is developed. The information required for compensator design is extracted from the cantilever deflection signal, hence eliminating the need for any additional sensors. The proposed approach is implemented and experimentally evaluated on the dynamic response of a custom made AFM. It is further assessed by comparing the imaging performance of the AFM with and without the application of the proposed technique and in comparison with the conventional counterbalancing methodology. The experimental results substantiate the effectiveness of the method in significantly improving the imaging performance of AFM at high scan speeds. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3663070]

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Type
research article
DOI
10.1063/1.3663070
Web of Science ID

WOS:000297941100032

Author(s)
Bozchalooi, I. S.
•
Youcef-Toumi, K.
•
Burns, D. J.
•
Fantner, G. E.  
Date Issued

2011

Publisher

American Institute of Physics

Published in
Review of Scientific Instruments
Volume

82

Issue

11

Article Number

113712

Subjects

Real-Time

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LBNI  
Available on Infoscience
February 23, 2012
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/78028
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